標題: The fabrication of a programmable via using phase-change material in CMOS-compatible technology
作者: Chen, Kuan-Neng
Krusin-Elbaum, Lia
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2-四月-2010
摘要: We demonstrate an energy-efficient programmable via concept using indirectly heated phase-change material. This via structure has maximum phase-change volume to achieve a minimum on resistance for high performance logic applications. Process development and material investigations for this device structure are reported. The device concept is successfully demonstrated in a standard CMOS-compatible technology capable of multiple cycles between on/off states for reconfigurable applications.
URI: http://dx.doi.org/10.1088/0957-4484/21/13/134001
http://hdl.handle.net/11536/5528
ISSN: 0957-4484
DOI: 10.1088/0957-4484/21/13/134001
期刊: NANOTECHNOLOGY
Volume: 21
Issue: 13
結束頁: 
顯示於類別:期刊論文


文件中的檔案:

  1. 000275242200002.pdf