標題: Nanocone SiGe antireflective thin films fabricated by ultrahigh-vacuum chemical vapor deposition with in situ annealing
作者: Chang, Yuan-Ming
Dai, Ching-Liang
Cheng, Tsung-Chieh
Hsu, Che-Wei
機械工程學系
Department of Mechanical Engineering
關鍵字: SiGe;Thin films;Annealing;Nanostructures;Antireflective layer;Atomic force microscopy
公開日期: 3-May-2010
摘要: In this study, we fabricated nanocone-presenting SiGe antireflection layers using only ultrahigh-vacuum chemical vapor deposition. In situ thermal annealing was adopted to cause SiGe clustering, yielding a characteristic nanocone array on the SiGe surface. Atomic force microscopy indicated that the SiGe nanocones had uniform height and distribution. Spectrophotometric measurements revealed that annealing at 900 degrees C yielded SiGe thin films possessing superior antireflective properties relative to those of the as-grown SiGe sample. We attribute this decrease in reflectance to the presence of the nanostructured cones. Prior to heat treatment, the mean reflectance of ultraviolet rays (wavelength <400 nm) of the SiGe thin film was ca. 61.7%; it reduced significantly to less than 28.5% when the SiGe thin film was annealed at 900 degrees C. Thus, the drop in reflectance of the SiGe thin film after thermal treatment exceeded 33%. (C) 2010 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2009.12.105
http://hdl.handle.net/11536/5417
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2009.12.105
期刊: THIN SOLID FILMS
Volume: 518
Issue: 14
起始頁: 3782
結束頁: 3785
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