標題: Method for gauge block measurement with the heterodyne central fringe identification technique
作者: Wu, Wang-Tsung
Chen, Yen-Liang
Hsieh, Hung-Chih
Chang, Wei-Yao
Su, Der-Chin
光電工程學系
Department of Photonics
公開日期: 1-六月-2010
摘要: In a modified Michelson interferometer, the top face of the wringing platen is first identified using the heterodyne central fringe identification technique. Then the reference mirror located in the other arm is moved by a precision translation stage until the top face of the tested gauge block is also identified with the same technique. The displacement of the mirror is exactly equivalent to the length of the tested gauge block. The measurable range of the interferometer relates to the maximum travel range of the translation stage and its uncertainty depends on the uncertainty of the heterodyne central fringe identification method and the resolution of the translation stage. (C) 2010 Optical Society of America
URI: http://dx.doi.org/10.1364/AO.49.003182
http://hdl.handle.net/11536/5314
ISSN: 0003-6935
DOI: 10.1364/AO.49.003182
期刊: APPLIED OPTICS
Volume: 49
Issue: 16
起始頁: 3182
結束頁: 3186
顯示於類別:期刊論文


文件中的檔案:

  1. 000278265600026.pdf