標題: Design, fabrication, and control of components in MEMS-based optical pickups
作者: Chiu, Yi
Chiou, Jin-Chern
Fang, Weileun
Lin, Yung-Jiun
Wu, Mingching
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: actuator;microelectromechanical systems (MEMS);optical pickup;silicon on insulation (SOI);small form factor
公開日期: 1-Feb-2007
摘要: Small-form-factor optical pickups and disk drives have been an area of intense research since the rise of portable consumer electronic products. In current technology, most of the devices are manufactured by the precision assembly of discrete miniaturized optomechanical components. The assembly process can be simplified and cost reduced by using the batch fabrication processes developed in microelectro-mechanical systems (MEMS). In this paper, the fabrication and testing of optical and actuator components for a MEMS-based optical pickup are presented. A novel design methodology is also applied to the servo control system of the pickup.
URI: http://dx.doi.org/10.1109/TMAG.2006.888402
http://hdl.handle.net/11536/5301
ISSN: 0018-9464
DOI: 10.1109/TMAG.2006.888402
期刊: IEEE TRANSACTIONS ON MAGNETICS
Volume: 43
Issue: 2
起始頁: 780
結束頁: 784
Appears in Collections:Conferences Paper


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