標題: Angle measurement using total-internal-reflection heterodyne interferometry
作者: Chiu, MH
Su, DC
交大名義發表
光電工程學系
National Chiao Tung University
Department of Photonics
關鍵字: angle measurement;total-internal-reflection effect;heterodyne interferometry
公開日期: 1-六月-1997
摘要: A new optical method for angle measurement based on total-internal-reflection heterodyne interferometry is presented. In this method, heterodyne interferometry is applied to measure the phase difference between s and p polarization states at total internal reflection. This phase difference depends on the angle of incidence. Hence, small-angle measurement can be performed only by evaluating this phase difference. The validity of the method is demonstrated, and it has a measurement range of 10 deg. Its resolution depends on the angle of incidence; the best resolution is 8x10(-5) deg. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
URI: http://hdl.handle.net/11536/511
ISSN: 0091-3286
期刊: OPTICAL ENGINEERING
Volume: 36
Issue: 6
起始頁: 1750
結束頁: 1753
顯示於類別:期刊論文


文件中的檔案:

  1. A1997XD38800026.pdf