標題: PRE-EPITAXIAL AND POST-EPITAXIAL GETTERING OF STACKING-FAULTS IN SILICON
作者: CHEN, MC
SILVESTRI, VJ
工學院
College of Engineering
公開日期: 1979
URI: http://hdl.handle.net/11536/5106
ISSN: 0013-4651
期刊: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 126
Issue: 8
起始頁: C368
結束頁: C368
Appears in Collections:Articles


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  1. A1979HH39300597.pdf