Title: GROWTH-KINETICS OF SILICON THERMAL NITRIDATION
Authors: WU, CY
KING, CW
LEE, MK
CHEN, CT
電控工程研究所
Institute of Electrical and Control Engineering
Issue Date: 1982
URI: http://hdl.handle.net/11536/4955
ISSN: 0013-4651
Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 129
Issue: 7
Begin Page: 1559
End Page: 1563
Appears in Collections:Articles


Files in This Item:

  1. A1982NW36700032.pdf