標題: POST-EPITAXIAL POLYSILICON AND SI3N4 GETTERING IN SILICON
作者: CHEN, MC
SILVESTRI, VJ
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1982
URI: http://hdl.handle.net/11536/4954
ISSN: 0013-4651
期刊: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 129
Issue: 6
起始頁: 1294
結束頁: 1299
顯示於類別:期刊論文


文件中的檔案:

  1. A1982NS83700036.pdf