標題: Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template
作者: Lin, Chen-Chun
Chang, Kai-Chun
Pan, Fu-Ming
Kuo, Cheng-Tzu
Liu, Mai
Mo, Chi-Neng
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: carbon nanotubes (CNT);anodic aluminum oxide (AAO);field-emission
公開日期: 1-四月-2007
摘要: Carbon nanotubes (CNT) were grown in anodic aluminum oxide (AAO) and used as field emitters in a triode structure. To fabricate the field-emission triode structure, nanoporous anodic aluminum oxide (AAO) thin layer was first prepared on the Si(100) substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition (ECR-CVD). The SiO2 dielectric and Al gate electrode layers required for the triode structure were directly deposited on the CNTs. Reactive ion and wet etches were then used to open the field-emission area in the triode. Scanning electron microscopy and Raman spectroscopy studies revealed that damage to CNT emitters in the etched area was trivial. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on electric field of similar to 8.05 V/mu m was measured. (C) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.diamond.2007.01.034
http://hdl.handle.net/11536/4926
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2007.01.034
期刊: DIAMOND AND RELATED MATERIALS
Volume: 16
Issue: 4-7
起始頁: 1388
結束頁: 1392
顯示於類別:會議論文


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