Title: THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS
Authors: LU, NCC
LU, CY
LEE, MK
SHIH, CC
WANG, CS
REUTER, W
SHENG, TT
電控工程研究所
Institute of Electrical and Control Engineering
Issue Date: 1984
URI: http://hdl.handle.net/11536/4870
ISSN: 0013-4651
Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 131
Issue: 4
Begin Page: 897
End Page: 902
Appears in Collections:Articles


Files in This Item:

  1. A1984SL25600042.pdf