標題: THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS
作者: LU, NCC
LU, CY
LEE, MK
SHIH, CC
WANG, CS
REUTER, W
SHENG, TT
電控工程研究所
Institute of Electrical and Control Engineering
公開日期: 1984
URI: http://hdl.handle.net/11536/4870
ISSN: 0013-4651
期刊: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 131
Issue: 4
起始頁: 897
結束頁: 902
顯示於類別:期刊論文


文件中的檔案:

  1. A1984SL25600042.pdf