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dc.contributor.authorLIN, MZen_US
dc.contributor.authorYU, YCSen_US
dc.contributor.authorWU, CYen_US
dc.date.accessioned2014-12-08T15:06:09Z-
dc.date.available2014-12-08T15:06:09Z-
dc.date.issued1986-11-01en_US
dc.identifier.issn0013-4651en_US
dc.identifier.urihttp://hdl.handle.net/11536/4713-
dc.language.isoen_USen_US
dc.titleAN ENVIRONMENT-INSENSITIVE TRILAYER STRUCTURE FOR TITANIUM SILICIDE FORMATIONen_US
dc.typeArticleen_US
dc.identifier.journalJOURNAL OF THE ELECTROCHEMICAL SOCIETYen_US
dc.citation.volume133en_US
dc.citation.issue11en_US
dc.citation.spage2386en_US
dc.citation.epage2389en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:A1986E734500033-
dc.citation.woscount8-
Appears in Collections:Articles


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