Design and fabrication of a flip-up two-axis micro scanning mirror driven by vertical comb actuators assembled by single-step push operation
|關鍵字:||微組裝;微掃描鏡;垂直梳狀致動器;靜電致動;assembly;scanning mirror;vertical comb;electrostatic actuator|
本論文研究之最終目標為設計一微光學資訊儲存平台，此微光學平台是以數個三維斜面微掃描鏡結構以及其他組裝於此平台上的光學元件所組成，並利用SOI (Silicon on Insulator)晶圓之兩層結構的特性製作抬起式微結構。
本論文已成功利用此單步驟下壓組裝法組裝30º、45º、60º等三種不同角度的雙軸微掃描鏡，並成功量測得到實際平均抬升角度分別為19.2º、31º、40º，並且對於抬升角度誤差問題加以探討。對於雙軸微掃描鏡之性能，也以成功量測到組裝前的動態掃描特性。單軸輸入驅動雙軸掃描之蛇狀扭轉彈簧設計的雙軸微掃描鏡於輸入純交流電壓±40Vac，輸入頻率400 Hz(換算掃描頻率800 Hz)，可得到全光學掃描角為15.11º。|
The semiconductor industry has developed quite maturely, and MEMS technology is also booming in recent years. In order to achieve micro-optical systems, the use of Micro-Opto-Electro-Mechanical System (MOEMS) and three-dimensional (3-D) flip-up MEMS structures can establish a free-space micro optical bench. Because the SOI (Silicon on Insulator) wafer has two structure layers, it is suitable for flip-up micro structures. In our previous study, a 45º flip-up uniaxial micro scanning mirror assembled by the simple push method was proposed, and the assembly of uniaxial micro scanning mirror was successful. The static and dynamic scanning performance of the unassembled micro scanning mirror had been measured successfully. A new assembly method is proposed in this thesis. The assembly step is simplified as only one step, and the the assembly time of flip-up micro structure can be greatly shortened. A two-axis micro scanning mirror has been successfully fabricated on this flip-up micro structure to achieve the optical tracking servo function of the optical pickup head. The 30º, 45º, and 60º two-axis micro scanning mirror assembled by single-step push operation was designed and have been assembled successfully. The flip-up angles have been measured successfully; the average flip-up angles were 19.2º , 31º , and 40º , respectively. The dynamic scanning angle of the serpentine spring design of the two-axis micro scanning mirror were measured. When the iuput pure AC voltage was ±40Vac and the input frequency was 400 Hz (converted into scanning frequency of 800 Hz), the full optical scanning angle of the two-axis micro scanning mirror was 15.11º.