Title: Comparative role of metal-organic decomposition-derived [100] and [111] in electrical properties of Pb(Zr,Ti)O-3 thin films
Authors: Chen, SY
Chen, IW
材料科學與工程學系
Department of Materials Science and Engineering
Keywords: PZT;MOD;texture;dielectric constant;remanent polarization;coercive field
Issue Date: 1-Jul-1997
Abstract: The effect of composition (phase), texture, microstructure and thickness on electrical properties of Pb(Zr1-zTiz)O-3 (PZT) films have been evaluated. Zr-rich PZT films with [111] texture have a higher remanent polarization and dielectric constant, but a lower coercive field as compared with PZT[100] films. Ti-rich PZT films with [100] texture have a higher dielectric constant, but a lower remanent polarization and coercive field as compared with PZT[111] films. Near the morphotropic phase boundary (MPB) composition, films with a mixed texture of [111] and [100] have a higher dielectric constant than PZT[100] and PZT[111] films even though the values of remanent polarization and coercive field of the mixed textured films are in between those of the other two films. Both remanent and saturation polarization are independent of film thickness, whereas dielectric constant decreases but coercive field increases at very small thickness.
URI: http://dx.doi.org/10.1143/JJAP.36.4451
http://hdl.handle.net/11536/459
ISSN: 0021-4922
DOI: 10.1143/JJAP.36.4451
Journal: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 36
Issue: 7A
Begin Page: 4451
End Page: 4458
Appears in Collections:Articles


Files in This Item:

  1. A1997XR22300049.pdf