Title: Off-axis unbalanced magnetron sputtering of YBa2Cu3O7 thin films
Authors: Tsai, WC
Tseng, TY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Keywords: unbalanced magnetron;YBCO;thin films;sputtering
Issue Date: 1-Jul-1997
Abstract: An unbalanced magnet assembly is used in DC off-axis sputtering to grow YBa2Cu3O7 superconducting thin films. The assembly with a stronger central magnet than the annular magnet directs plasma to bombard the off-axis substrate, resulting in deteriorated thin films. In contrast, the assembly with a weaker central magnet directs plasma away from the off-axis substrate and results in a film with a higher transition temperature and a smoother surface. Furthermore, the latter type of unbalanced DC magnetron sputtering gives a higher deposition rate and enables the grown film to be uniform in composition on static substrates over a range of 8 cm in length. These results reveal the feasibility of using the unbalanced magnetron for thin film growth.
URI: http://hdl.handle.net/11536/448
ISSN: 0254-0584
Journal: MATERIALS CHEMISTRY AND PHYSICS
Volume: 49
Issue: 3
Begin Page: 229
End Page: 233
Appears in Collections:Articles


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  1. A1997XP59600007.pdf