標題: ELLIPSOMETRY MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX AND THICKNESS OF POLYSILICON THIN-FILMS
作者: HO, JH
LEE, CL
LEI, TF
CHAO, TS
交大名義發表
電控工程研究所
National Chiao Tung University
Institute of Electrical and Control Engineering
公開日期: 1-二月-1990
URI: http://dx.doi.org/10.1364/JOSAA.7.000196
http://hdl.handle.net/11536/4180
ISSN: 0740-3232
DOI: 10.1364/JOSAA.7.000196
期刊: JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
Volume: 7
Issue: 2
起始頁: 196
結束頁: 205
顯示於類別:期刊論文


文件中的檔案:

  1. A1990CK60100002.pdf