標題: PRECISION DISPLACEMENT MEASUREMENT BY ACTIVE LASER HETERODYNE INTERFEROMETRY
作者: LIN, YJ
PAN, CL
交大名義發表
光電工程學系
National Chiao Tung University
Department of Photonics
關鍵字: METROLOGY;LASER
公開日期: 1-五月-1991
摘要: We demonstrate an active laser heterodyne interferometer which can automatically compensate environmental disturbances and is capable of precision displacement measurement. Two Zeeman He-Ne lasers were employed. Laser II was used as the light source to stabilize the interferometer by using a piezomirror in a feedback loop. The heterodyne signal of the two lasers was used to directly calibrate mirror displacement, with the wavelength of laser I tuned to compensate change in the interference signal due to displacement only. Separation of the contributions to the interference signal from displacement and external disturbances was accomplished by using polarization optics. This interferometer was used to measure the hysteresis of a piezoelectric transducer (PZT) over a dynamic range of 0.5-mu-m with a resolution of +/- 0.8 nm.
URI: http://hdl.handle.net/11536/3789
ISSN: 0003-6935
期刊: APPLIED OPTICS
Volume: 30
Issue: 13
起始頁: 1648
結束頁: 1652
顯示於類別:期刊論文


文件中的檔案:

  1. A1991FL91100019.pdf