標題: Parameter extraction of resistive thermal microsensors by AC electrical method
作者: Ou-Yang, M
Sheen, CS
Shie, JS
光電工程學系
Department of Photonics
關鍵字: AC electrical method thermal variables measurement;electrothermal effect;parameter extraction;thermal microsensors
公開日期: 1-四月-1998
摘要: Obtaining device parameters of thermal microsensors is essential for evaluating their performances and simulation modeling. We report an sc electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance, and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results are compared with other methods.
URI: http://hdl.handle.net/11536/32709
ISSN: 0018-9456
期刊: IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
Volume: 47
Issue: 2
起始頁: 403
結束頁: 408
顯示於類別:期刊論文


文件中的檔案:

  1. 000078557800011.pdf