標題: A three-intensity technique for polarizer-sample-analyser photometric ellipsometry and polarimetry
作者: Chao, YF
Lee, WC
Hung, CS
Lin, JJ
交大名義發表
National Chiao Tung University
公開日期: 21-八月-1998
摘要: This work presents a novel three-intensity-measurement technique to determine the ellipsometric parameters psi and Delta in a polarizer-sample-analyser photometric ellipsometer. This technique can be employed to correct the azimuthal misalignment of the analyser with respect to the plane of incidence. By performing two sets of measurements with this technique with the polarizer's azimuth at +45 degrees and -45 degrees, respectively, we can simultaneously determine the azimuthal deviation of the polarizer and further improve the ellipsometric measurements. Applying this technique in the transmission mode allows us to obtain the phase retardation and the optical axis of a waveplate at the same time.
URI: http://dx.doi.org/10.1088/0022-3727/31/16/005
http://hdl.handle.net/11536/32451
ISSN: 0022-3727
DOI: 10.1088/0022-3727/31/16/005
期刊: JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume: 31
Issue: 16
起始頁: 1968
結束頁: 1974
顯示於類別:期刊論文


文件中的檔案:

  1. 000075643900005.pdf