標題: Three electrodes touch-mode capacitive pressure sensor
作者: Chang, KM
Hwang, GJ
Hsien, YL
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-Dec-1998
摘要: A three-electrode capacitive pressure sensor for touch-mode operation with sensitivity of 0.030 pF/kPa (or 10.4 mV/kPa using CP-10 C/V converter circuit) in the pressure range of 170-280 kPa is presented with theoretical explanation of experimental results. A special ring structure is designed to integrate a sensing capacitor and a reference capacitor into the same cavity to partially cancel out the temperature effect. A third electrode is included to eliminate two-level connections without reducing its pressure sensitivity. The sensor offers the advantages of simple fabrication processes, planar connections, as well as high sensitivity, near-linear output, and large over-range pressure.
URI: http://hdl.handle.net/11536/31699
ISSN: 0946-7076
期刊: MICROSYSTEM TECHNOLOGIES
Volume: 5
Issue: 2
起始頁: 93
結束頁: 99
Appears in Collections:Articles


Files in This Item:

  1. 000077859200008.pdf