標題: An intelligent supervisory system for ion implantation in IC fabrication processes
作者: Shen, LC
Hsu, PL
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: ion implantation;beam maps;supervision;feature extraction;symptom analysis;fuzzy expert systems
公開日期: 1-二月-1999
摘要: This pager presents a real-time intelligent supervision system for IC ion implantation processes. A hardware interface is developed, to extract the features directly from the 2-D analog image signals of a beam map. A qualitative model for the beam scanning is then obtained, and the symptoms of abnormal operations can be analyzed to achieve on-line diagnosis. Furthermore, a fuzzy expert system is developed to advise operators on making appropriate adjustments for the beam scanning. This supervisory system has been implemented on Eaten NV-6200 A/AV ion implanters at the Taiwan Semiconductor Manufacturing Company. (C) 1999 Elsevier Science Ltd. All rights reserved.
URI: http://hdl.handle.net/11536/31525
ISSN: 0967-0661
期刊: CONTROL ENGINEERING PRACTICE
Volume: 7
Issue: 2
起始頁: 241
結束頁: 247
顯示於類別:期刊論文


文件中的檔案:

  1. 000079300200011.pdf