標題: Simultaneous measurement of spectral optical properties and thickness of an absorbing thin film on a substrate
作者: Chen, JJ
Lin, JD
Sheu, LJ
機械工程學系
Department of Mechanical Engineering
關鍵字: absorbing media;refractive index;spectral dependence;polyvinylalcohol
公開日期: 8-Oct-1999
摘要: This paper describes a technique and also illustrates an application of the technique for simultaneously measuring both the spectral complex refractive index (n(1),k(1)) and the thickness d(1) of an absorbing thin solid layer on a thick substrate. The contours of constant reflectance R and transmittance T in the (n(1), k(1)), (n(1), d(1)) and (k(1), d(1)) planes are examined for a thin layer on a substrate, which is exposed to oblique unpolarized incidence, under various conditions in order to facilitate an optimal choice of the combination of measured quantities for the inverse estimation of parameters. Theoretical analysis illustrates that optimal choices would include measurement of R at a large angle of incidence, combined with measurements of normal T and near normal R so as to reduce erroneous solutions or nonconvergence. And any additional measurement R at any angle of incidence may be used to prevent the multiple solutions. For the inverse estimation of parameters, we also present a technique in association of the least squares method to extract the thickness and optical constants characterizing the thin absorbing film from measurements of R and T. The method is then applied for experimental measurement of the optical properties and thickness of a polyvinylalcohol (PVA) film placed upon a substrate of ZnSe. These results provide useful information for analyses on the applications of PVA in textile sizing, adhesives, polymerization stabilizers, and paper coating. (C) 1999 Elsevier Science S.A. All rights reserved.
URI: http://dx.doi.org/10.1016/S0040-6090(99)00530-1
http://hdl.handle.net/11536/31035
ISSN: 0040-6090
DOI: 10.1016/S0040-6090(99)00530-1
期刊: THIN SOLID FILMS
Volume: 354
Issue: 1-2
起始頁: 176
結束頁: 186
Appears in Collections:Articles


Files in This Item:

  1. 000083571500030.pdf