標題: Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor processes
作者: Lu, JK
Ko, FH
Chu, TC
Sun, YC
Wang, MY
Wang, TK
奈米中心
Nano Facility Center
關鍵字: radioactive tracer;cleaning efficiency;lithographic sample;open-focused microwave digestion;inductively coupled plasma mass spectrometry
公開日期: 29-Feb-2000
摘要: A radioactive tracer technique was applied to investigate the effectiveness of various wet cleaning recipes in removing metallic impurities such as sodium, iron and cesium. The effects of solution temperatures and substrate types were studied. The mechanisms of the electrochemical segregation of metallic impurities between the substrate and cleaning solution were examined. The enthalpy of oxide formation and the effect of adsorption were the two reasons for the presence of surface metal impurities in the cleaning solutions. Our results indicated that SC2 and DHF can effectively remove the metallic impurities at 47 and 82 degrees C, while SPM and BOE are only effective at 82 degrees C. The gravimetric method was successfully implemented to evaluate the open-focused microwave digestion efficiency for anti-reflective coating and photoresist (PR) samples. By following the established microwave digestion method and inductively coupled plasma mass spectrometric determination, the detection limits (DLs) obtained for multi-elements were in the ng ml(-1) and sub-ng ml(-1) levels. Except for calcium, the spike recoveries of the metals were in the range 82-121% for the lithographic samples. The analytical results were found to be in reasonably good agreement with literature values, and the lithographic sample throughput can achieve up to 3.5 samples per hour for the analysis of 13 elements. (C) 2000 Elsevier Science B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/S0003-2670(99)00818-1
http://hdl.handle.net/11536/30719
ISSN: 0003-2670
DOI: 10.1016/S0003-2670(99)00818-1
期刊: ANALYTICA CHIMICA ACTA
Volume: 407
Issue: 1-2
起始頁: 291
結束頁: 300
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