標題: CMOS compatible thermoelectric infrared sensors
作者: Shown, CS
Chi, S
光電工程學系
Department of Photonics
公開日期: 22-六月-2000
摘要: A new structure for CMOS compatible thermoelectric infrared sensors is proposed. By using micro-link structures to connect several floating membranes, the largest floating membrane area yet obtained and large output voltages have been realised. The characteristics of the sensors have been measured, and are compared with those of existing devices.
URI: http://dx.doi.org/10.1049/el:20000823
http://hdl.handle.net/11536/30455
ISSN: 0013-5194
DOI: 10.1049/el:20000823
期刊: ELECTRONICS LETTERS
Volume: 36
Issue: 13
起始頁: 1117
結束頁: 1118
顯示於類別:期刊論文


文件中的檔案:

  1. 000087981100016.pdf