標題: The characterization of nitrogen content, diamond-like carbon field emission arrays using a magnetic filtered arc method
作者: Chen, CF
Shen, CH
Lin, CL
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: diamond-like carbon;field emission arrays;filtered arc deposition
公開日期: 1-Dec-2000
摘要: Uniform and large area pyramid-shape diamond-like carbon (DLC) field emission arrays are successfully deposited using the filtered are deposition (FAD) system. Nitrogen gas serves as the dopant source to deposit the diamond-like carbon films on the inverted pyramid-shape SiO2 substrates. Experimental results indicate that the current-voltage (I-V) value of field emission arrays is closely related to the diamond-like carbon film quality. The amount of N-2 content in the film influences the composition of the diamond-like carbon, sp(2) bonding carbon and graphite. It was found that the sp? bonding carbon content of the diamond-like carbon increases with increasing N-2 doping. With nitrogen doping, the emission anode current of the diamond-like carbon film significantly increases, eventually reaching 142 muA at a voltage of 30 V, at heavily N-doped concentrations (10 seem), when the films reach a high defect density. (C) 2000 Elsevier Science B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/S0040-6090(00)01433-4
http://hdl.handle.net/11536/30080
ISSN: 0040-6090
DOI: 10.1016/S0040-6090(00)01433-4
期刊: THIN SOLID FILMS
Volume: 377
Issue: 
起始頁: 326
結束頁: 330
Appears in Collections:Conferences Paper


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