標題: Metal organic chemical vapor deposition growth of GaN-based light emitting diodes with naturally formed nano pyramids
作者: Chiu, Ching-Hua
Lee, Chia-En
Lo, Ming-Hua
Huang, Hung-Wen
Lu, Tien-Chang
Kuo, Hao-Chung
Wang, Shing Chung
光電工程學系
Department of Photonics
關鍵字: GaN;Mg-treatment;nano pyramids
公開日期: 1-Apr-2008
摘要: GaN-based light-emitting diodes (LEDs) with naturally formed nano pyramids roughened surfaces grown by metal organic chemical vapor deposition (MOCVD) were demonstrated. In this study, Mg-treatment, a growth-.interruption step and a surface treatment using biscyclopentadienyl magnesium (CP(2)Mg), was performed to form the nano pyramids on the surface of a p-type cladding layer, and then a p-type contact layer was grown on the p-type cladding layer, so as to create a p-type contact layer with a rough surface. Assisted by the nano pyramids surface roughening process, the light output power of the LEDs reached 11.3 and 9.7 mW with 10 and 5 min Mg-treatment at a driving current of 20 mA. The light outputs were increased by 48 and 27%, respectively, compared with the results from the LED without Mg-treatment.
URI: http://dx.doi.org/10.1143/JJAP.47.2954
http://hdl.handle.net/11536/29942
ISSN: 0021-4922
DOI: 10.1143/JJAP.47.2954
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 47
Issue: 4
起始頁: 2954
結束頁: 2956
Appears in Collections:Conferences Paper


Files in This Item:

  1. 000255449100136.pdf