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dc.contributor.authorChang, Lien_US
dc.contributor.authorYan, Jhih-Kunen_US
dc.date.accessioned2014-12-08T15:44:11Z-
dc.date.available2014-12-08T15:44:11Z-
dc.date.issued2008-04-01en_US
dc.identifier.issn0925-9635en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.diamond.2008.01.014en_US
dc.identifier.urihttp://hdl.handle.net/11536/29843-
dc.description.abstractUniform distribution of bias-enhanced nucleation of diamond has been improved on Si substrate of an area of 1 x 1 cm(2) by using a domeshaped Mo counter electrode in a microwave plasma chemical vapor deposition reactor. A nucleation density of 10(9) cm(2) can be reached within a few minutes when the bias voltage of - 100 V is applied on the substrates. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) show that a single-crystalline diamond in a few nanometered size can be deposited on a volcano-shaped cubic SiC which is epitaxially formed on a Si cone. Examination reveals a large fraction of diamond nuclei are oriented along with one side of SiC on each Si cone. The Si cone formed on the Si substrate is due to plasma etching. The diamond nuclei have a shape close to rhombus in TEM. With further growth, secondary nucleation of diamond occurs on top of diamond nuclei and SiC which grows with Si cones. As a result, polycrystalline diamonds are deposited on each Si cone. (C) 2008 Elsevier B.V. All fights reserved.en_US
dc.language.isoen_USen_US
dc.subjectnucleationen_US
dc.subjectorientationen_US
dc.subjectbiasen_US
dc.subjectmicroscopyen_US
dc.titleBias-enhanced nucleation of oriented diamonds on cone-like Sien_US
dc.typeArticle; Proceedings Paperen_US
dc.identifier.doi10.1016/j.diamond.2008.01.014en_US
dc.identifier.journalDIAMOND AND RELATED MATERIALSen_US
dc.citation.volume17en_US
dc.citation.issue4-5en_US
dc.citation.spage467en_US
dc.citation.epage471en_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.identifier.wosnumberWOS:000256643300012-
Appears in Collections:Conferences Paper


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