標題: Growth of ZnMgO/ZnO films on r-plane sapphires by pulsed laser deposition
作者: Liang, Mei-Hui
Ho, Yen-Teng
Wang, Wei-Lin
Peng, Chun-Yen
Chang, Li
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: characterization;laser epitaxy;oxides;semiconducting II-VI materials deposition
公開日期: 1-四月-2008
摘要: High-quality ZnMgO/ZnO multi-layer thin films in a-plane orientation were grown by pulsed laser deposition on r-plane sapphires. Reflection high-energy electron diffraction (RHEED) patterns were performed to monitor the growth morphology and the epitaxy. X-ray diffraction, RHEED, and atomic force microscopy show that anisotropic growth of a-plane ZnO results in stripe morphology, and the difference of thermal expansion between ZnO and sapphire plays a significant role on the film surface smoothness. Cross-sectional transmission electron microscopy identifies the cause of disorientation of ZnO growth on sapphire. (C) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.jcrysgro.2007.11.158
http://hdl.handle.net/11536/29754
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2007.11.158
期刊: JOURNAL OF CRYSTAL GROWTH
Volume: 310
Issue: 7-9
起始頁: 1847
結束頁: 1852
顯示於類別:會議論文


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