標題: Fabrication of optical gratings by shrinkage of a rubber material
作者: Shih, Teng-Kai
Ho, Jeng-Rong
Liao, Hung-Yu
Chen, Chia-Fu
Liu, Chueh-Yang
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: PDMS;metal films;wavy structures;gratings
公開日期: 30-Jun-2008
摘要: Ordered wavy surface structures generated by deposition of a metal thin film on a pre-stretched PDMS plate were fabricated and its potential application for optical gratings was proposed. The orientation of the generated structures was always perpendicular to the pre-stretched direction and the pitch of the structure could be adjusted ranging from 4.5 mu m to 6.8 mu m by controlling the strength of the pre-stretched strain and the thickness of the surface metal film. Based on these periodic structures, various optical gratings were demonstrated. With a slight modification of the fabrication scheme, gratings with different orientations can be fabricated on both sides of the PDMS plate, the double-sided gratings, could be fabricated. It is believed the current method has the potential for the fabrication of a large-scale diffractive grating at lower costs. (C) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2007.07.092
http://hdl.handle.net/11536/29386
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2007.07.092
期刊: THIN SOLID FILMS
Volume: 516
Issue: 16
起始頁: 5339
結束頁: 5343
Appears in Collections:Conferences Paper


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