標題: Characterization and Modeling of on-chip spiral inductors for Si RFICs
作者: Chao, CJ
Wong, SC
Kao, CH
Chen, MJ
Leu, LY
Chiu, KY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: equivalent lumped circuit;inductors;modeling;skin effect
公開日期: 1-Feb-2002
摘要: The paper presents a complete characterization of on-chip inductors fabricated in BiCMOS technology. First, a study of the scaling effect of inductance on geometry and structure parameters is presented to provide a clear guideline on inductor scaling with suitable quality factors. The substrate noise analysis and noise reduction techniques are then investigated. It is shown that floating well can improve both quality factor and noise elimination by itself under 3 GHz and together with a guard ring above 3 GHz. Finally, for accurate circuit simulations, a new inductor model is developed for predicting the skin effect and eddy effect and associated quality factor and inductance.
URI: http://dx.doi.org/10.1109/TSM.2002.983440
http://hdl.handle.net/11536/29043
ISSN: 0894-6507
DOI: 10.1109/TSM.2002.983440
期刊: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume: 15
Issue: 1
起始頁: 19
結束頁: 29
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