Title: CHARACTERIZATION OF SEMIINSULATING POLYCRYSTALLINE SILICON PREPARED BY LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION
Authors: CHAO, TS
LEE, CL
LEI, TF
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Issue Date: 1-Sep-1993
Abstract: We employed the multiple angle incident ellipsometer to study the growth mechanism and optical properties of semi-insulating polycrystalline silicon (SIPOS) films deposited by the low-pressure chemical vapor deposition (LPCVD) technique. A significant difference of the imaginary part of the refractive index between film at the edge and those in the central region of the wafer was observed. Our analyses showed that it was consistent with the N2O depletion model. This N2O depletion phenomenon was confirmed by Auger analysis. Moreover, we found that spatial N2O depletion at the edge of the wafer was greatly influenced by the flow rate of SiH4 to N2O gases. Excessively high N2O flow rate suppressed the silicon microcrystal resulting in a thinner SIPOS film.
URI: http://hdl.handle.net/11536/2893
ISSN: 0013-4651
Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 140
Issue: 9
Begin Page: 2645
End Page: 2648
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