Title: Determination of ultrathin oxide thickness by subthreshold swing
Authors: Cha, TS
電子物理學系
Department of Electrophysics
Keywords: oxide;subthreshold swing;N2O;thickness
Issue Date: 1-May-2002
Abstract: Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O-2.
URI: http://dx.doi.org/10.1143/JJAP.41.2904
http://hdl.handle.net/11536/28834
ISSN: 0021-4922
DOI: 10.1143/JJAP.41.2904
Journal: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 41
Issue: 5A
Begin Page: 2904
End Page: 2905
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