標題: Determination of ultrathin oxide thickness by subthreshold swing
作者: Cha, TS
電子物理學系
Department of Electrophysics
關鍵字: oxide;subthreshold swing;N2O;thickness
公開日期: 1-五月-2002
摘要: Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O-2.
URI: http://dx.doi.org/10.1143/JJAP.41.2904
http://hdl.handle.net/11536/28834
ISSN: 0021-4922
DOI: 10.1143/JJAP.41.2904
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 41
Issue: 5A
起始頁: 2904
結束頁: 2905
顯示於類別:期刊論文


文件中的檔案:

  1. 000176515700022.pdf