Title: A photonic device compatible process in fabricating tunable Fabry-Perot filter
Authors: Lin, WT
Chiou, JC
Chou, BCS
Institute of Electrical and Control Engineering
Issue Date: 15-Sep-2002
Abstract: A photonic device compatible low temperature process that is suitable for fabricating tunable Fabry-Perot filter is proposed in this paper [1]. The advantages of the presented process consist of (1) materials used in this process are compatible with existing optical or IC process; (2) process and detected spectra are not limited by different substrates. Experimental results of the manufactured tunable Fabry-Perot filter indicated that the full-width-half-maximum (FWHM) is closed to 1.3 nm and the measurement of reflectance of distributed Bragg reflectors is up to 99%. Note that within the 10 nm experimental tuning range, the FWHM is kept close to 1.3 nm with tuning voltage from 0 to 30 V. The experimental results showed that the presented process has potential to apply to wavelength division multiplexing (WDM) specifications of optical telecommunication. In particular, the process would also be integrated to fabricate tunable VCSEL processes. (C) 2002 Elsevier Science B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/S0030-4018(02)01691-7
ISSN: 0030-4018
DOI: 10.1016/S0030-4018(02)01691-7
Volume: 210
Issue: 3-6
Begin Page: 149
End Page: 154
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