標題: 40-GHz coplanar waveguide bandpass filters on silicon substrate
作者: Chan, KT
Chen, CY
Chin, A
Hsieh, JC
Liu, J
Duh, TS
Lin, WJ
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-Nov-2002
摘要: We report a very simple process to fabricate high performance filter on Si at 40 GHz; using proton implantation. The filter has only -3.4-dB loss at peak transmission of 40 GHz; with a broad 9-GHz bandwidth. In sharp contrast, the filter on 1.5-mum SiO2 isolated Si has much worse transmission and reflection loss. This is the first demonstration of high performance filter at millimeter-wave regime on Si with process compatible to current VLSI technology.
URI: http://dx.doi.org/10.1109/LMWC.2002.805535
http://hdl.handle.net/11536/28422
ISSN: 1531-1309
DOI: 10.1109/LMWC.2002.805535
期刊: IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS
Volume: 12
Issue: 11
起始頁: 429
結束頁: 431
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