標題: Self-organized titanium oxide nanodot arrays by electrochemical anodization
作者: Chen, PL
Kuo, CT
Tsai, TG
Wu, BW
Hsu, CC
Pan, FM
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 28-四月-2003
摘要: Ordered nanodot arrays of titanium oxides were prepared from TiN/Al films on the silicon substrate by electrochemical anodization of a TiN layer using a nanoporous anodic aluminum oxide film as the template. The microstructure of the nanodot arrays was studied by transmission electron microscopy and scanning electron microscopy, and the chemical composition of nanodots was analyzed by electron energy loss spectroscopy. The as-prepared nanodots are basically composed of amorphous TiOx with a hexagonal arrangement and an average diameter of about 60 nm. Using this approach, it is expected that nanodot arrays of various oxide semiconductors can be achieved. (C) 2003 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.1571661
http://hdl.handle.net/11536/27948
ISSN: 0003-6951
DOI: 10.1063/1.1571661
期刊: APPLIED PHYSICS LETTERS
Volume: 82
Issue: 17
起始頁: 2796
結束頁: 2798
顯示於類別:期刊論文


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