標題: A Flexible Microwave De-Embedding Method for On-Wafer Noise Parameter Characterization of MOSFETs
作者: Wang, Yueh-Hua
Cho, Ming-Hsiang
Wu, Lin-Kun
電信工程研究所
Institute of Communications Engineering
關鍵字: de-embedding;microwave;MOSFETs;noise;RF;silicon
公開日期: 1-Sep-2009
摘要: A flexible noise de-embedding method for on-wafer microwave measurements of silicon MOSFETs is presented in this study. We use the open, short, and thru dummy structures to subtract the parasitic effects from the probe pads and interconnects of a fixtured MOS transistor. The thru standard are used to extract the interconnect parameters for subtracting the interconnect parasitics in gate, drain, and source terminals of the MOSFET. The parasitics of the dangling leg in the source terminal are also modeled and taken into account in the noise de-embedding procedure. The MOS transistors and de-embedding dummy structures were fabricated in a standard CMOS process and characterized up to 20 GHz. Compared with the conventional de-embedding methods, the proposed technique is accurate and area-efficient.
URI: http://dx.doi.org/10.1587/transele.E92.C.1157
http://hdl.handle.net/11536/27487
ISSN: 0916-8524
DOI: 10.1587/transele.E92.C.1157
期刊: IEICE TRANSACTIONS ON ELECTRONICS
Volume: E92C
Issue: 9
起始頁: 1157
結束頁: 1162
Appears in Collections:Conferences Paper


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