標題: Improvement of the performance of ZnO TFTs by low-temperature supercritical fluid technology treatment
作者: Chen, Min-Chen
Chang, Ting-Chang
Huang, Sheng-Yao
Chang, Kuan-Chang
Huang, Hui-Chun
Chen, Shih-Ching
Lu, Jin
Gan, Der-Shin
Ho, New-Jin
Young, Tai-Fa
Jhang, Geng-Wei
Tai, Ya-Hsiang
顯示科技研究所
Institute of Display
關鍵字: ZnO;Supercritical fluid
公開日期: 25-Dec-2009
摘要: in this paper, the supercritical CO(2) (SCCO(2)) fluid technology is successfully applied to improve the electrical characteristics of sputtered ZnO TFTs at low temperature (150 degrees C). After the treatment of SCCO(2) fluids mixed with water, the ZnO TFT exhibited superior transfer characteristics and lower threshold voltage. According to X-ray photoelectron spectroscopy (XPS) analyses, the improvements were attributed to the increase of binding energies of Zn-O bonds, hydrogen-related donors and the reduction of traps at the grain boundaries in ZnO thin films. In addition, the crystalline quality and microstructure of ZnO thin films were also investigated by using X-ray diffraction (XRD) and transmission electron microscopy (TEM). The transmittance of the ZnO film was measured by an N&K analyzer 1280 (N&K Technology, Inc.), which is a new type of thin-film measurement system. (C) 2009 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.surfcoat.2009.09.050
http://hdl.handle.net/11536/27288
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2009.09.050
期刊: SURFACE & COATINGS TECHNOLOGY
Volume: 204
Issue: 6-7
起始頁: 1112
結束頁: 1115
Appears in Collections:Conferences Paper


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