標題: Epitaxial growth of titanium oxycarbide on MgO (001) substrates by pulsed laser deposition
作者: Do, Hien
Yen, Tzu-Chun
Tian, Chih-Sheng
Wu, Yue-Han
Chang, Li
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: Titanium oxycarbide;Epitaxial growth;Pulsed laser deposition
公開日期: 15-一月-2011
摘要: Epitaxial TiC(x)O(y) thin films were grown on MgO (0 0 1) substrates by using pulsed laser deposition method. High-resolution X-ray diffraction and transmission electron microscopy were used to examine crystallinity and microstructure of epitaxial TiC(x)O(y) film on MgO. The chemical composition of the film is determined to be x similar to 0.47 and y similar to 0.69 by X-ray photoelectron spectroscopy. Atomic force microscopy revealed that the surface of TiC(x)O(y) film is very smooth with roughness of 0.18 nm. The resistivity of the TiC(x)O(y) film measured by four-point-probe method was about 137 mu Omega cm. (C) 2010 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.apsusc.2010.10.105
http://hdl.handle.net/11536/25883
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.10.105
期刊: APPLIED SURFACE SCIENCE
Volume: 257
Issue: 7
起始頁: 2990
結束頁: 2994
顯示於類別:期刊論文


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