標題: Anodic aluminum oxide template assisted growth of vertically aligned carbon nanotube arrays by ECR-CVD
作者: Chen, PL
Chang, JK
Kuo, CT
Pan, FM
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: nanotubes;graphite;plasma CVD;field emission
公開日期: 1-十一月-2004
摘要: Highly aligned carbon nanorubes (CNTs) have been successfully grown in vertical channels of the anodic aluminum oxide (AAO) template by microwave plasma electron cyclotron resonance chemical vapor deposition (ECR-CVD). Nanoporous AAO templates with hexagonal pore pattern were prepared by the two-step anodization of A] films. Following the electroplating of Co catalyst into the pore bottom, multiwalled CNTs were synthesized in the ECR-CVD system using a gas mixture of CH4 and H-2. The microstructure of the CNTs was studied by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The CNTs with a very high packing density and a uniform size distribution are well graphitized, and Co particles embedded at their tips implies the tip growth mechanism. The segments of CNTs stretching out of the AAO nanopores still maintain relatively good alignment, and have a very slow growth rate, which allows us to obtain reproducible tube length by tuning the growth time. Field emission measurements of the CNTs showed derivable electron emission properties, attributed to their uniformity in size, good alignment, and good graphitization properties. (C) 2004 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.diamond.2004.05.007
http://hdl.handle.net/11536/25737
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2004.05.007
期刊: DIAMOND AND RELATED MATERIALS
Volume: 13
Issue: 11-12
起始頁: 1949
結束頁: 1953
顯示於類別:會議論文


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  1. 000225057300004.pdf