標題: Synthesis of diamond hexagonal nanoplatelets by microwave plasma chemical vapor deposition
作者: Lu, CA
Chang, L
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: platelets;electron microscopy;nanotubes;morphology
公開日期: 1-十一月-2004
摘要: Variation of diamond deposition with temperature gradient was studied using standing-up substrates embedded within the plasma ball in microwave plasma chemical vapor deposition (MPCVD). The substrate is a polycrystalline diamond coated with a 30-nm thick iron film before deposition. Surface morphologies of the deposits and their crystalline characteristics were characterized by scanning electron microscopy, transmission electron microscopy (TEM), and selected area diffraction. On the upper area of the specimen near the center of the plasma ball where the temperature is the highest (>1100 degreesC, formation of diamond nanoplatelets in hexagonal shape with a thickness of 2060 nm and side length of several hundreds of nanometers is found. In the middle region, diamond nanoplatelets with some iron nanoparticles are observed. Around the bottom region with low temperature near the edge of the plasma ball, nanodiamonds, Fe nanoparticles, and carbon nanotubes coexisted. The relative temperature distributions of diamond and carbon nanotube growth are briefly discussed. (C) 2004 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.diamond.2004.07.027
http://hdl.handle.net/11536/25715
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2004.07.027
期刊: DIAMOND AND RELATED MATERIALS
Volume: 13
Issue: 11-12
起始頁: 2056
結束頁: 2062
顯示於類別:會議論文


文件中的檔案:

  1. 000225057300026.pdf