標題: Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Vol 447, pg 516, 2004)
作者: Chang, TC
Yan, ST
Liu, PT
Lin, ZW
Aoki, H
Sze, SM
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 22-十一月-2004
URI: http://dx.doi.org/10.1016/j.tsf.2004.05.002
http://hdl.handle.net/11536/25630
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2004.05.002
期刊: THIN SOLID FILMS
Volume: 467
Issue: 1-2
起始頁: 342
結束頁: 342
顯示於類別:期刊論文


文件中的檔案:

  1. 000224185100055.pdf