標題: Submicron organic thin-film transistors fabricated by film profile engineering method
作者: Wu, Ming-Hung
Lin, Horng-Chih
Lin, Hung-Cheng
Zan, Hsiao-Wen
Meng, Hsin-Fei
Huang, Tiao-Yuan
物理研究所
電子工程學系及電子研究所
光電工程學系
Institute of Physics
Department of Electronics Engineering and Institute of Electronics
Department of Photonics
公開日期: 28-Jul-2014
摘要: In this work, we explore and demonstrate the feasibility of a film profile engineering (FPE) concept in fabricating pentacene-based organic thin-film transistors (OTFTs) with submicron channel length. The FPE scheme utilizes a suspended bridge built on the wafer and the specific deposition conditions to form thin films with desirable profiles. In order to form a continuous pentacene channel under the bridge, the background pressure of thermal evaporator is adjusted by pumping down the filling N-2 to a specific level. The results show that, by setting the deposition pressure at 3 mtorr, functional operations of OTFTs with channel length ranging from 0.4 to 0.6 mu m are obtained. (C) 2014 AIP Publishing LLC.
URI: http://dx.doi.org/10.1063/1.4892404
http://hdl.handle.net/11536/25090
ISSN: 0003-6951
DOI: 10.1063/1.4892404
期刊: APPLIED PHYSICS LETTERS
Volume: 105
Issue: 4
結束頁: 
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