標題: Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H-2 Sintering
作者: Yen, Li-Chen
Tang, Ming-Tsyr
Chang, Fang-Yu
Pan, Tung-Ming
Chao, Tien-Sheng
Lee, Chiang-Hsuan
電子物理學系
Department of Electrophysics
關鍵字: low-temperature polycrystalline-silicon (poly-Si);thin-film transistors (TFTs);H-2 sintering;pH sensitivity
公開日期: 1-Mar-2014
摘要: In this article, we report an improvement in the pH sensitivity of low-temperature polycrystalline-silicon (poly-Si) thin-film transistor (TFT) sensors using an H-2 sintering process. The low-temperature polycrystalline-silicon (LTPS) TFT sensor with H-2 sintering exhibited a high sensitivity than that without H-2 sintering. This result may be due to the resulting increase in the number of Si-OH2+ and Si-O- bonds due to the incorporation of H in the gate oxide to reduce the dangling silicon bonds and hence create the surface active sites and the resulting increase in the number of chemical reactions at these surface active sites. Moreover, the LTPS TFT sensor device not only offers low cost and a simple fabrication processes, but the technique also can be extended to integrate the sensor into other systems.
URI: http://dx.doi.org/10.3390/s140303825
http://hdl.handle.net/11536/24760
ISSN: 1424-8220
DOI: 10.3390/s140303825
期刊: SENSORS
Volume: 14
Issue: 3
起始頁: 3825
結束頁: 3832
Appears in Collections:Articles


Files in This Item:

  1. 000336783300001.pdf