標題: Enhanced light harvesting of nitride-based nanopillars covered with ZnO using indium-tin oxide nanowhiskers
作者: Hsu, Lung-Hsing
Lin, Chien-Chung
Lee, Hsin-Ying
Huang, Jhih-Kai
Han, Hau-Vei
Tsai, Yu-Lin
Yu, Peichen
Kuo, Hao-Chung
Lee, Ching-Ting
光電系統研究所
照明與能源光電研究所
Institute of Photonic System
Institute of Lighting and Energy Photonics
公開日期: 1-Apr-2014
摘要: Nitride-based nanopillars were successfully fabricated by nanoimprint lithography. A nanowhisker of indium-tin oxide (ITO) deposited by on oblique evaporation method was investigated in nitride-based nanopillars and thin ZnO layers grown by atomic layer deposition (ALD). From the results of field-emission scanning electron microscopy (SEM) measurement, it was found that ITO whiskers grew on nitride-based nanopillars covered with ZnO. Moreover, from the results of UV-visible spectrophotometry and bidirectional reflectance distribution function (BRDF) measurements, it was found that this hybrid structure of ITO nanowhiskers above a ZnO medium enhanced the broadband and angle-independent antireflection in the range between 380 and 600nm. We used the hybrid design of the ITO/ZnO structure to achieve the lowest reflectance value between 3.8 and 10.9% in a quantum well absorption range. (C) 2014 The Japan Society of Applied Physics
URI: http://dx.doi.org/10.7567/JJAP.53.04ER10
http://hdl.handle.net/11536/24747
ISSN: 0021-4922
DOI: 10.7567/JJAP.53.04ER10
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 53
Issue: 4
結束頁: 
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