標題: Two-dimensional photo-mapping on CMOS single-photon avalanche diodes
作者: Wu, Jau-Yang
Lu, Ping-Keng
Lin, Sheng-Di
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 30-六月-2014
摘要: Two-dimensional (2-D) photo-count mapping on CMOS single photon avalanche diodes (SPADs) has been demonstrated. Together with the varied incident wavelengths, the depth-dependent electric field distribution in active region has been investigated on two SPADs with different structures. Clear but different non-uniformity of photo-response have been observed for the two studied devices. With the help of simulation tool, the non-uniform photo-counts arising from the electric field non-uniformity have been well explained. As the quasi-3D distribution of electric field in the active region can be mapped, our method is useful for engineering the device structure to improve the photo-response of SPADs. (C) 2014 Optical Society of America
URI: http://dx.doi.org/10.1364/OE.22.016462
http://hdl.handle.net/11536/24632
ISSN: 1094-4087
DOI: 10.1364/OE.22.016462
期刊: OPTICS EXPRESS
Volume: 22
Issue: 13
起始頁: 16462
結束頁: 16471
顯示於類別:期刊論文


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  1. 000338055900123.pdf