Title: Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate
Authors: Do, Hien
Van-Truong Dai
Tian, Jr-Sheng
Yen, Tzu-Chun
Chang, Li
材料科學與工程學系
電子工程學系及電子研究所
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
Keywords: Epitaxial titanium oxynitride;Nanoindentation;Mechanical properties
Issue Date: 25-Jul-2014
Abstract: We investigate the effect of chemical composition and residual stress on the mechanical properties of high-quality epitaxial TiNxOy films deposited on MgO(001) substrates by using nanoindentation. The lattice parameters and residual strain/stress of TiNxOy films decrease as oxygen concentration increases. Hardness and Young\'s modulus determined by nanoindentation are about 17-26 GPa and 355-430 GPa, respectively, which vary with chemical composition and residual stress. (C) 2014 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.surfcoat.2014.03.058
http://hdl.handle.net/11536/24608
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2014.03.058
Journal: SURFACE & COATINGS TECHNOLOGY
Volume: 251
Issue: 
Begin Page: 1
End Page: 6
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