標題: Automatic defect recognition of TFT array process using gray level co-occurrence matrix
作者: Yang, Shih-Wei
Lin, Chern-Sheng
Lin, Shir-Kuan
Chiang, Hsien-Te
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: Automatic optical inspection system;TFT array;Defect classifier
公開日期: 2014
摘要: This study proposed an automatic optical inspection (AOI) system for detection of thin-film transistor (TFT) array defects. gray level co-occurrence matrix (GLCM) and MATLAB regionprops function were used to calculate 53 TFT array defect features, which were inputted into the neural network to train the defect classifier. The images to be inspected were compared with a standard image first, in order to judge whether the TFT array samples have defects. For defective images of a TFT array, the proposed defect classifier can successfully recognize five kinds of defects in the process. According to the experimental results, the defect recognition rate of proposed system is verified to be 83.3%, which can replace manual inspection and reduce the risks of false inspections due to long duration manual work. Moreover, the proposed AOI system can improve testing efficiency and reduce manufacturing costs. (C) 2014 Elsevier GmbH. All rights reserved.
URI: http://hdl.handle.net/11536/24589
http://dx.doi.org/10.1016/j.ijleo.2013.11.070
ISSN: 0030-4026
DOI: 10.1016/j.ijleo.2013.11.070
期刊: OPTIK
Volume: 125
Issue: 11
起始頁: 2671
結束頁: 2676
顯示於類別:期刊論文


文件中的檔案:

  1. 000337118300042.pdf