標題: Defects in nonpolar (13(4)over-bar0) ZnO epitaxial film grown on (114) LaAlO3 substrate
作者: Yen, Tzu-Chun
Wang, Wei-Lin
Peng, Chun-Yen
Tian, Jr-Sheng
Ho, Yen-Teng
Chang, Li
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 1-三月-2014
摘要: The defects in (13 (4) over bar0)ZnO epitaxial film grown on (114)LaAlO3 (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[(1) over bar2 (1) over bar0] and 1/2[0001]. Threading dislocations with the Burgers vectors of 1/3 < 11 (2) over bar0 > and < 0001 > are distributed on the basal plane. In (13 (4) over bar0)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6 < 20 (2) over bar3 > displacement vectors. The densities of dislocations and BSFs are about 3.8 x 10(10) cm(-2) and 3.1 x 10(5) cm(-1), respectively. (C) 2014 American Vacuum Society.
URI: http://dx.doi.org/10.1116/1.4830275
http://hdl.handle.net/11536/24501
ISSN: 0734-2101
DOI: 10.1116/1.4830275
期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume: 32
Issue: 2
結束頁: 
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