Full metadata record
DC FieldValueLanguage
dc.contributor.authorChen, Wei-Chunen_US
dc.contributor.authorWu, Yue-Hanen_US
dc.contributor.authorPeng, Chun-Yenen_US
dc.contributor.authorHsiao, Chien-Nanen_US
dc.contributor.authorChang, Lien_US
dc.date.accessioned2014-12-08T15:36:07Z-
dc.date.available2014-12-08T15:36:07Z-
dc.date.issued2014-05-01en_US
dc.identifier.issn1556-276Xen_US
dc.identifier.urihttp://dx.doi.org/10.1186/1556-276X-9-204en_US
dc.identifier.urihttp://hdl.handle.net/11536/24462-
dc.description.abstractInxAl1-xN films were deposited on Si(100) substrate using metal-organic molecular beam epitaxy. We investigated the effect of the trimethylindium/trimethylaluminum (TMIn/TMAI) flow ratios on the structural, morphological, and optical properties of InxAl1-xN films. Surface morphologies and microstructure of the InxAl1-xN films were measured by atomic force microscopy, scanning electron microscopy, X-ray diffraction (XRD), and transmission electron microscopy (TEM), respectively. Optical properties of all films were evaluated using an ultraviolet/visible/infrared (UV/Vis/IR) reflection spectrophotometer. XRD and TEM results indicated that InxAl1-xN films were preferentially oriented in the c-axis direction. Besides, the growth rates of InxAl1-xN films were measured at around 0.6 mu m/h in average. Reflection spectrum shows that the optical absorption of the InxAl1-xN films redshifts with an increase in the In composition.en_US
dc.language.isoen_USen_US
dc.subjectInAlNen_US
dc.subjectIn/Al ratiosen_US
dc.subjectRF-MOMBEen_US
dc.titleEffect of In/Al ratios on structural and optical properties of InAlN films grown on Si(100) by RF-MOMBEen_US
dc.typeArticleen_US
dc.identifier.doi10.1186/1556-276X-9-204en_US
dc.identifier.journalNANOSCALE RESEARCH LETTERSen_US
dc.citation.volume9en_US
dc.citation.issueen_US
dc.citation.epageen_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.identifier.wosnumberWOS:000336035400001-
dc.citation.woscount2-
Appears in Collections:Articles


Files in This Item:

  1. 000336035400001.pdf