標題: Effect of In/Al ratios on structural and optical properties of InAlN films grown on Si(100) by RF-MOMBE
作者: Chen, Wei-Chun
Wu, Yue-Han
Peng, Chun-Yen
Hsiao, Chien-Nan
Chang, Li
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: InAlN;In/Al ratios;RF-MOMBE
公開日期: 1-May-2014
摘要: InxAl1-xN films were deposited on Si(100) substrate using metal-organic molecular beam epitaxy. We investigated the effect of the trimethylindium/trimethylaluminum (TMIn/TMAI) flow ratios on the structural, morphological, and optical properties of InxAl1-xN films. Surface morphologies and microstructure of the InxAl1-xN films were measured by atomic force microscopy, scanning electron microscopy, X-ray diffraction (XRD), and transmission electron microscopy (TEM), respectively. Optical properties of all films were evaluated using an ultraviolet/visible/infrared (UV/Vis/IR) reflection spectrophotometer. XRD and TEM results indicated that InxAl1-xN films were preferentially oriented in the c-axis direction. Besides, the growth rates of InxAl1-xN films were measured at around 0.6 mu m/h in average. Reflection spectrum shows that the optical absorption of the InxAl1-xN films redshifts with an increase in the In composition.
URI: http://dx.doi.org/10.1186/1556-276X-9-204
http://hdl.handle.net/11536/24462
ISSN: 1556-276X
DOI: 10.1186/1556-276X-9-204
期刊: NANOSCALE RESEARCH LETTERS
Volume: 9
Issue: 
結束頁: 
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