標題: Robustness Analysis of Mixed Product Run-to-Run Control for Semiconductor Process Based on ODOB Control Structure
作者: Lee, An-Chen
Horng, Jeng-Haur
Kuo, Tzu-Wei
Chou, Nan-Hung
機械工程學系
Department of Mechanical Engineering
關鍵字: Disturbance observer;uncertainty;mixed product;robust stability;run-to-run
公開日期: 1-五月-2014
摘要: In this paper, we propose a unified framework for the mixed-product run-to-run (RtR) controller, which is called the output disturbance observer (ODOB) structure. Many mixed-product RtR controllers, such as product-based exponentially weighted moving average (PB-EWMA) threaded predictor corrector controller (t-PCC), cycle forecasting EWMA (CF-EWMA), and combined product and tool disturbance estimator (CPTDE), can fit in this framework. The relations of the above-mentioned controllers and the ODOB controller are discussed. Furthermore, based on the ODOB structure, we analyze the robust stable conditions and provide a systematic method for obtaining the optimal parameters that guarantee the optimal nominal performance under the robust stability. The simulation cases show that the output performances of PB-EWMA, t-PCC, CF-EWMA, and CPTDE controllers are improved by using the optimal weights obtained from the proposed approach.
URI: http://dx.doi.org/10.1109/TSM.2014.2303206
http://hdl.handle.net/11536/24461
ISSN: 0894-6507
DOI: 10.1109/TSM.2014.2303206
期刊: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume: 27
Issue: 2
起始頁: 212
結束頁: 222
顯示於類別:期刊論文


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